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Adhesion Aspects in MEMS/NEMS

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and;

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Mems and Nems

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes ;...

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Materials and Failures in MEMS and NEMS

The fabrication of MEMS has been predominately achieved by etching the polysilicon material. Howeve;...

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From MEMS to Bio-MEMS and Bio-NEMS

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing ;...

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MEMS/NEMS Sensors

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Advances In Multiphysics Simulation And Experimental Testing Of Mems

This volume takes a much needed multiphysical approach to the numerical and experimental evaluation ;...

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Optical MEMS, Nanophotonics, and Their Applications

This book covers device design fundamentals and system applications in optical MEMS and nanophotonic;...

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Optical MEMS, Nanophotonics, and Their Applications

This book covers device design fundamentals and system applications in optical MEMS and nanophotonic;...

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MEMS Pressure Sensors

MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication ;...

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Self-Powered and Soft Polymer MEMS/NEMS Devices

This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review o;...

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Microelectromechanical Systems - Materials and Devices IV

Symposium S, 'Microelectromechanical Systems - Materials and Devices IV', held November 29-December ;...

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Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Ana;...

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Fracture of Nano and Engineering Materials and Structures

The 16th European Conference of Fracture (ECF16) was held in Greece, July, 2006. It focused on all a;...

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Materials Science of Microelectromechanical Systems (MEMS) Devices II

. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well;

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Modeling Mems and Nems

Designing small structures necessitates an a priori understanding of various device behaviors. The w;...

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Introduction to Nano Science and Technologies

State of Art technologies in various potential areas of Nano Science and Technologies like Carbon Na;...

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MEMS Linear and Nonlinear Statics and Dynamics

of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and;

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Micro Electro Mechanical Systems (MEMS)

So-called top-down technologies have enabled us to manufacture and fabricate structures even smaller;...

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Micromachines as Tools for Nanotechnology

Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the inves;...

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Micromachines as Tools for Nanotechnology

Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the inves;...

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Measurement Technology for Micro-Nanometer Devices

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scal;...

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Microfluidics and Bio-MEMS

The past two decades have seen rapid development of micro-/nanotechnologies with the integration of ;...

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Electronic Composites

Electronic composites, whose properties can be controlled by thermal or electromagnetic means, play ;...

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Electronic Composites

Electronic composites, whose properties can be controlled by thermal or electromagnetic means, play ;...

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Microelectromechanical Systems

Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major i;...

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Advances in Dynamics, Vibration and Control

Discusses papers classified under eight broad areas: bridges/soil structure vibration, vibration und;...

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