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MEMS/NEMS Sensors

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Self-Powered and Soft Polymer MEMS/NEMS Devices

This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review o;...

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MEMS Pressure Sensors

MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication ;...

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Mems and Nems

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes ;...

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Microelectromechanical Systems - Materials and Devices IV

Symposium S, 'Microelectromechanical Systems - Materials and Devices IV', held November 29-December ;...

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Materials and Failures in MEMS and NEMS

The fabrication of MEMS has been predominately achieved by etching the polysilicon material. Howeve;...

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Adhesion Aspects in MEMS/NEMS

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro-;...

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From MEMS to Bio-MEMS and Bio-NEMS

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing ;...

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Advances In Multiphysics Simulation And Experimental Testing Of Mems

This volume takes a much needed multiphysical approach to the numerical and experimental evaluation ;...

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Optical MEMS, Nanophotonics, and Their Applications

This book covers device design fundamentals and system applications in optical MEMS and nanophotonic;...

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Optical MEMS, Nanophotonics, and Their Applications

This book covers device design fundamentals and system applications in optical MEMS and nanophotonic;...

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Electronic Composites

Electronic composites, whose properties can be controlled by thermal or electromagnetic means, play ;...

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Electronic Composites

Electronic composites, whose properties can be controlled by thermal or electromagnetic means, play ;...

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Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology

Providing a clear theoretical understanding of MEMS and NEMS, Solid-State Physics, Fluidics, and Ana;...

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Mems for Automotive and Aerospace Applications

MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (;...

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Smart Sensors and MEMS

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second;...

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MEMS and Nanotechnology for Gas Sensors

How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-powe;...

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MEMS and Nanotechnology for Gas Sensors

How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, h;...

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Sensors, Nanoscience, Biomedical Engineering, and Instruments

In two editions spanning more than a decade, The Electrical Engineering Handbook stands as the defin;...

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Modeling Mems and Nems

Designing small structures necessitates an a priori understanding of various device behaviors. The w;...

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Sensors and Biosensors, MEMS Technologies and its Applications

Sensors and Biosensors, MEMS Technologies and its Applications (Book Series: Advances in Sensors: Re;...

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Introduction to Nano Science and Technologies

State of Art technologies in various potential areas of Nano Science and Technologies like Carbon Na;...

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