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MEMS Pressure Sensors
MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication ;...
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Mems for Automotive and Aerospace Applications
MEMS for automotive and aerospace applications reviews the use of Micro-Electro-Mechanical-Systems (;...
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Handbook of Silicon Based MEMS Materials and Technologies
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guid;...
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Smart Sensors and MEMS
Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second;...
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MEMS and Nanotechnology for Gas Sensors
How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-powe;...
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MEMS and Nanotechnology for Gas Sensors
How Can We Lower the Power Consumption of Gas Sensors? There is a growing demand for low-power, h;...
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Ceramic Thick Films for MEMS and Microdevices
The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS ma;...
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MEMS/NEMS Sensors
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MEMS Sensors and Resonators
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Mems and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications
The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devi;...
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MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications
The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devi;...
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The MEMS Handbook - 3 Volume Set
As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much;...
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Sensors and Biosensors, MEMS Technologies and its Applications
Sensors and Biosensors, MEMS Technologies and its Applications (Book Series: Advances in Sensors: Re;...
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Handbook of Mems for Wireless and Mobile Applications
The increasing demand for mobile and wireless sensing necessitates the use of highly integrated tech;...
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Self-Powered and Soft Polymer MEMS/NEMS Devices
This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review o;...
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Surface Plasmon Resonance Based Mems Displacement Sensors
Strong dependence of surface plasmon resonance (SPR) on coupling parameters offers new varieties of ;...
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MEMS Resonator Filters
The use of MEMS resonators for signal processing is relatively new and has the potential to change t;...
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Microelectromechanical Systems Materials and Devices
This book is part of a popular series on the materials science of MEMS devices. In the years since, ;...
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Advanced Mechatronics and MEMS Devices II
This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices i;...
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Analysis and Design Principles of MEMS Devices
Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars,;...
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Inertial MEMS
A practical and systematic overview of the design, fabrication and test of MEMS-based inertial senso;...
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MEMS Barometers Toward Vertical Position Detection
Micro-Electro-Mechanical-Systems (MEMS) sensors constitute perhaps the most exciting technology of o;...
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An Introduction to Microelectromechanical Systems Engineering
A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in ;...
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MEMS Silicon Oscillating Accelerometers and Readout Circuits
Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the dis;...
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