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Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing;
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This book is part of a popular series on the materials science of MEMS devices. In the years since, many sophisticated devices have emerged;
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This book is prepared by the specialists in the field of microelectromechanical systems (MEMS). It consists of two major sections dedicated;
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This is an all-inclusive book on microelectromechanical systems (MEMS). The developments of MEMS and devices have been influential in the;
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Symposium S, 'Microelectromechanical Systems - Materials and Devices IV', held November 29-December 3 at the 2010 MRS Fall Meeting;
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Microelectromechanical systems (MEMS) refer to the technology of microscopic devices that consists of moving parts. It is made up;
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MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize;
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This book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC;
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A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing;
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Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide;
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most important hurdles to commercialization for microelectromechanical systems is covered in detail: the reliability of MEMS materials and;
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The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight;
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The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight;
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Creative Design of Mechanical Devices deals with the fundamental concepts of mechanical design and engineering. It includes the basic;
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Background 2 Integrated Circuit-Based Fabrication Technologies and Materials 3 New Materials and Processes 4 Designing Microelectromechanical;
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in MEMS devices and packaging. This authoritative guide presents cutting-edge MEMS (microelectromechanical systems) packaging techniques, such as;
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This accessible volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an;
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microstructures and mechanical systems in the late 1980s. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an;
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bearings...gas lubricated bearings... microelectromechanical systems (MEMS)...and much more. Presenting practical know-how on everything required;
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Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances;
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